Customer Requirements:
- VentureLAB, a Canadian company located in Markham ON, started a new Hardware Initiative Lab to provide multiple measurement capabilities to Canadian companies, start-ups to large companies. They wanted a modular, flexible, and small footprint probe system that could easily be moved to and placed on workbenches in the lab next to the test instrumentation. They also wanted the ability to have the probe system mounted on a vibration isolation table and the test instrumentation moved to the VIT location. The probe system would primarily be used to test packaged parts, die, and small wafers and interfaced to a variety of test instrumentation.
SemiProbe Device Characterization Solution for VentureLAB:
Key System Components:
- SemiProbe Lab Assistant LA-100 DC manual probe system consisting of: o Vibration Isolation Table (VIT) with casters and leveling feet
- Manual Wafer Stage with coarse and fine X,Y,Z, and theta movement
- Platen with magnetic skin, removable front-wedge, and platen lift
- 100 mm wafer chuck (non-thermal) – with concentric vacuum rings to hold die, partial wafers, and whole wafers up to 100 mm (4”)
- Manipulators – four (4) manual MA-8005 with coaxial and triaxial probe arms
- Microscope Post with microscope movement – coaxial and linear 100 mm X & Y travel
- Stereo Zoom Optics
- CCTV System – color camera, 24” color monitor, and monitor stand
- Vacuum and Pressure Pumps - small footprint and quiet
VentureLab Device Characterization Lab with SemiProbe probe systems and several different types of test instrumentation
SemiProbe LA-100 Lab Assistant Wafer Probe Station configured for Device Characterization of wafers and packaged parts - DC and High Frequency
Adjustable Packaged Part Holder
MA-8005 manual micro-positioner with coaxial probe arm used for Device Characterization
LA-100 probe system accessories used for Device Characterization - vacuum chuck and vacuum pump
Accessory - vibration isolation table with casters and leveling feet used with the LA-100 probe system
Accessory - Air compressor, small footprint and quiet and used to float the vibration isolation table
Accessory - triaxial probe arm used for low leakage Device Characterization applications