Semiconductor Wafer Prober Testing & Prober Technology Insights

Success Story – High Frequency Wafer Prober– SA8HF Load Pull - Canada 

November 05, 2021

Customer Requirements: 

VentureLAB, a Canadian company located in Markham ON, started a new Hardware Initiative Lab to provide multiple measurement capabilities to Canadian companies, start-ups to large companies. They wanted a semiautomatic probe system that allowed them to easily configure it to meet a variety of device characterization capabilities for testing die, partial wafers, whole wafers, and packaged parts at temperatures ranging from -65 C to 200 C. 

VentureLab Device Characterization Project

SemiProbe High-Frequency Wafer Prober Solution for VentureLAB: 

Key System Components: 

  • Probe System for Life PS4L SA-8 HF semiautomatic probe system consisting of: o Vibration Isolation Table (VIT) with casters and leveling feet 
  • 200 mm Programmable X,Y,Z, and theta stage with control electronics 
  • Load Stroke – for easy device loading and unloading 
  • 200 mm thermal chuck system with triaxial addon surface and independent HF auxiliary chucks (2) that operates from -65 C to 200 C 
  • Large Platen with stainless steel skin for magnetic-based manipulators, removable front wedge, and linear platen lift (coarse and fine) 
  • Manipulators – four (4) manual MA-9000 with West/East and North/South HF, coaxial and triaxial probe arms 
  • Adjustable Package Part Holder – includes mounting plate for the thermal chuck 
  • Probe Card Holder 
  • Localized Environmental Chamber (LEC) – with top-hat and LEC cover plate, provides a light tight, EMI, and frost-free environment 
  • Microscope Post with microscope movement – coaxial and linear 100 mm X & Y travel 
  • Fusion Zoom Tube Compound Optics with long working distance objectives 
  • CCTV System – color camera, 24” color monitor and monitor stand 
  • PC/Monitor/GPIB/Adjustable Monitor/Keyboard/Mouse Rack 
  • PILOT Software Suite – Navigator, Wafer Map and Auto Align 
  • Two (2) customized tuner mounts for Focus Microwave Multi-Purpose Tuners, model MPT-1818 that operate from 1.8 GHz to 18 GHz 
  • Vacuum and Pressure Pumps – small footprint and quiet 

High Frequency Wafer Testing Probe Card HolderProbe Card Holder with a High Frequency Probe Card used with the  SemiProbe Semiautomatic SA-8 HF    Wafer Prober...

 

Wafer Testing Lab High-Frequency Device CharacterizationSemiProbe SA-8 HF prober system configured to test high-frequency devices at  low and high temperatures

 

High Frequency Wafer Prober Air Compressor

Accessory - small footprint and quiet air compressor

 

 

Localized Environmental Chamber (LEC)  Device Characterization

Top Hat used with the Localized Environmental Chamber (LEC)  that provides  light and EMI shielding in a frost-free environment operating from -65 C to 200 C

 

Focus Microwave Multi-Purpose Tuner for Device CharacterizationFocus Microwave Multi-Purpose Tuner, Model MPT-1118, interfaced with the SemiProbe SA-8 semiautomatic probe system for High-Frequency measurements

 

 

Device Characterization Packaged Part Holder

Adjustable Packaged Part Holder

 

 

High Frequency Wafer Probe System

Multiple Views of SemiProbe SA-8 semiautomatic High Frequency wafer prober system configured with the Focus Microwave Multi-Purpose Tuners

 

High Frequency Probe Station for Device Characterization

SemiProbe SA-8 High-Frequency probe system with a Localized Environmental Chamber for -65C to 200 C temperature testing

 

High Frequency Device Characterization Probe Arm

High-Frequency Probe Arm and Probe used with SemiProbe Top Hat and Localized Environmental Chamber

 

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Topics: Application - High Frequency, Success Stories

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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