A University required a small footprint and flexible probing solution that would allow them to test 100 mm wafers, chips, and packaged parts up to 3 KV. Volume was low so a manual probe system with manual manipulators and a variety of high voltage (HV) and low voltage DC probe arms were desired. The probe system would interface to a Keysight B1506. Due to the lethal voltage levels required to test the devices, a safety enclosure would be required.
A SemiProbe PS4L M-4 manual probe system configured with a thermal chuck and manual manipulators to perform device characterization at high voltages up to 3 KV
Closeup view of a 3 (75 mm) power transistor wafer affixed via vacuum to a thermal chuck and being probed with manual manipulators up to 3 KV
Typical feedthrough interconnect panel that contains low voltage coaxial and triaxial connectors, 3 KV triaxial connectors, a safety interlock and a rubberized boot for direct cable feedthrough