Success Story – MEMS Microfluidics Wafer Probe System Application – United States 

November 15, 2021

Customer Requirements: 

A semiautomatic probe system is used for production testing of 150 mm and 200 mm MEMS wafers using probe cards, a dispensing system, and a Keithley S500 test system.

SemiProbe MEMS Microfluidics Wafer Probe System Solution: 

MEMS Microfluidic Wafer Probe

MEMS Microfluidic 200 mm Semiautomatic Probe System with Keithley S-500 Test System

MEMS Microfluidics Probe CardMEMS Semiautomatic Probe System with a Probe Card


MEMS Microfluidics Prober System DispenserMEMS. Microfluidic Dispense System


Key MEMS Microfluidics Wafer Testing System Components: 

  • Vibration Isolation Table (VIT) with casters and leveling feet 
  • A programmable X, Y, Z, and theta stage with control electronics. The wafer stage has > 200 mm of X and Y travel 
  • 200 mm standard wafer chuck 
  • Probe Card Holder with coarse and fine theta adjustment 
  • Microscope Post with linear and coaxial X & Y microscope movement – 100 mm x 100 mm 
  • Stereo Zoom Microscope – with long working distance of 100 mm 
  • CCTV Camera System – color camera, 24” color monitor 
  • PC/Monitor/GPIB Card 
  • PILOT Software Suite – Navigator, Wafer Map, and Auto Align 
  • Keithley Test System controlled from the S500 Automated Characterization Suite (ACS) software using the SemiProbe driver via GPIB 
  • Dispense System – custom-designed – pump with two (2) dispense units  
  • Test Instrumentation – Keithley S500 Series


Keithley Semiconductor Device Characterization Handbook

Topics: Application - MEMS, Success Stories

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
Find me on:
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SemiProbe Capabilities & Applications Guide for Wafer Characterization & Testing