Semiconductor Testing & Prober Technology Insights

Success Story – MEMS Prober System - Taiwan

July 28, 2021

SemiProbe provided a turnkey and Integrated 200 mm Semiautomatic MEMS Probe System with an Olympus Metallurgical Microscope for a large Wafer Foundry.

Customer Requirements for their MEMS Wafer Prober System:

  • Complete turnkey and integrated  MEMS wafer probing system to test up to 200 mm microfluidic MEMS wafers over temperature
  • Integrated solution had to provide a fully functional MEMS wafer probing and high magnification inspection capabilities using one platform
  • Programmable Manipulators for electrical testing and fluidic dispense
  • The devices needed to be heated and monitored from ambient to > 300 degrees. 
  • All test instrumentation, cables, connectors, and a Graphical User Interface (GUI) had to be provided

SemiProbe Solution:

Whole MEMS wafers, partial MEMS wafers, and individual die can be probed on the system using manipulators or a probe card. The devices are inserted in customized carriers and are held in place via a vacuum. The devices can be loaded on an adjacent bench or table and are easily inserted into and removed from the chuck assembly. 

Complete MEMS Prober System - Showing Olympus Metallurgical / Biological Microscope Integrated with a 200 mm Semiautomatic Probe SystemComplete MEMS Prober System - Showing Olympus Metallurgical / Biological Microscope Integrated with a 200 mm Semiautomatic Probe System

 

 

Programmable MEMS Manipulators with High-Frequency ProbesProgrammable MEMS Manipulators with High-Frequency Probes

 

MEMS Wafer Carriers for Topside / Backside TestingMEMS Wafer Carriers for Topside / Backside Testing

 

Partial MEMS Wafer Carrier for Topside / Backside TestingPartial MEMS Wafer Carrier for Topside / Backside Testing

 

Individual Die Carrier for Topside / Backside Testing

Individual Die Carrier for Topside / Backside Testing

 

Key MEMS Probe System Components:

  • PS4L SA-8 semiautomatic probe system with programmable X,Y,Z, and theta stage
  • Thermal Chuck System that operates from ambient to > 300 C
  • Custom carriers for whole wafers, partial wafers, and individual die
  • Customized Microfluidic Dispense System – input and output
  • Four (4) programmable X,Y and Z manipulators with coaxial, triaxial and high frequency probe arms
  • Probe Card Holder
  • Test Instrumentation Rack and Cabling
  • Customized Vibration Isolation Table, Dark Box and Dark Box Feedthrough Interconnect Panel
  • Customized Graphical User Interface (GUI)

Keithley Semiconductor Device Characterization Handbook

 

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Topics: Application - MEMS, Success Stories

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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