---
title: Success Story – MEMS Prober System - Taiwan
description: Learn about a complete turnkey and integrated MEMS wafer prober system to test up to 200 mm microfluidic MEMS wafers over temperature.
---

[Semiconductor Testing & Prober Technology Insights ](https://blog.semiprobe.com)

# [Success Story – MEMS Prober System - Taiwan](https://blog.semiprobe.com/mems-prober-system)

 Written by [Denis Place](https://blog.semiprobe.com/author/denis-place) | July 28, 2021

# SemiProbe provided a turnkey and Integrated 200 mm Semiautomatic MEMS Probe System with an Olympus Metallurgical Microscope for a large Wafer Foundry.

### Customer Requirements for their MEMS Wafer Prober System:

- Complete turnkey and integrated  MEMS wafer probing system to test up to 200 mm microfluidic MEMS wafers over temperature
- Integrated solution had to provide a fully functional MEMS wafer probing and high magnification inspection capabilities using one platform
- Programmable Manipulators for electrical testing and fluidic dispense
- The devices needed to be heated and monitored from ambient to > 300 degrees. 
- All test instrumentation, cables, connectors, and a Graphical User Interface (GUI) had to be provided

### SemiProbe Solution:

Whole MEMS wafers, partial MEMS wafers, and individual die can be probed on the system using manipulators or a probe card. The devices are inserted in customized carriers and are held in place via a vacuum. The devices can be loaded on an adjacent bench or table and are easily inserted into and removed from the chuck assembly. 

Complete MEMS Prober System - Showing Olympus Metallurgical / Biological Microscope Integrated with a 200 mm Semiautomatic Probe System

 

 

Programmable MEMS Manipulators with High-Frequency Probes

 

MEMS Wafer Carriers for Topside / Backside Testing

 

Partial MEMS Wafer Carrier for Topside / Backside Testing

 

Individual Die Carrier for Topside / Backside Testing

 

### Key MEMS Probe System Components:

- PS4L SA-8 semiautomatic probe system with programmable X,Y,Z, and theta stage
- Thermal Chuck System that operates from ambient to > 300 C
- Custom carriers for whole wafers, partial wafers, and individual die
- Customized Microfluidic Dispense System – input and output
- Four (4) programmable X,Y and Z manipulators with coaxial, triaxial and high frequency probe arms
- Probe Card Holder
- Test Instrumentation Rack and Cabling
- Customized Vibration Isolation Table, Dark Box and Dark Box Feedthrough Interconnect Panel
- Customized Graphical User Interface (GUI)

 

[View full post](https://blog.semiprobe.com/mems-prober-system)

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