Optoelectronic Wafer Prober VCSELS - Success Story

Customer Requirements:

The customer wanted a 150 mm semiautomatic probe system to test vertical cavity surface-emitting laser diodes (VCSELS). The VCSELS were in wafer and individual die form and tested at temperatures ranging from 25 C to 200 C.  The customer required the device to be biased from the top and bottom.  A manual manipulator with a multi-contact DC wedge was used for biasing. A second manual manipulator was used  for a non-contact height measurement sensor. An optical fiber was required to collect the light and it needed to be mounted to a three-axis programmable manipulator with a goniometer.

SemiProbe Solution:

Vertical Cavity Surface Emitting Laser Diodes (VCSELS)

• SA-6 Semiautomatic Probe System
  • 150 mm programmable X,Y,Z and Theta stage
  • PILOT Software Suite – Navigator, Wafer Map and Autoalign
  • Vibration Isolation Table with Test Instrumentation Rack
• 150 mm thermal chuck – ambient to 200 C
• PI three (3) axis programmable manipulator with goniometer used for fiber
• DC manipulator with multi-contact DC wedge
• Optical fiber arm with Non-Contact Height Measurement Sensor
• Zoom Tube optics with CCTV System

 To learn more about Advanced Optoelectronic Wafer Probers Click Here.