Optoelectronic Wafer Prober VCSELS - Success Story

May 13, 2019

Customer Requirements:

The customer wanted a 150 mm semiautomatic probe system to test vertical cavity surface-emitting laser diodes (VCSELS). The VCSELS were in wafer and individual die form and tested at temperatures ranging from 25 C to 200 C.  The customer required the device to be biased from the top and bottom.  A manual manipulator with a multi-contact DC wedge was used for biasing. A second manual manipulator was used  for a non-contact height measurement sensor. An optical fiber was required to collect the light and it needed to be mounted to a three-axis programmable manipulator with a goniometer.


Optoelectronic Wafer Prober VCSELS


SemiProbe Solution:

Vertical Cavity Surface Emitting Laser Diodes (VCSELS)

  • SA-6 Semiautomatic Probe System
    • 150 mm programmable X,Y,Z and Theta stage
    • PILOT Software Suite – Navigator, Wafer Map and Autoalign
    • Vibration Isolation Table with Test Instrumentation Rack
  • 150 mm thermal chuck – ambient to 200 C
  • PI three (3) axis programmable manipulator with goniometer used for fiber
  • DC manipulator with multi-contact DC wedge
  • Optical fiber arm with Non-Contact Height Measurement Sensor
  • Zoom Tube optics with CCTV System

Optoelectronic Wafer Prober VCSELS

 To learn more about Advanced Optoelectronic Wafer Probers Click Here.


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Topics: Application - Optoelectronics, Success Stories, Semi-Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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