Success Story - Semiautomatic Optoelectronics Wafer Test System - Light Emitting Diodes

The customer wanted a semiautomatic probe system to test light emitting diodes (LEDS) in a few different modes - wafer form, wafers sawn and stretched on frames or rings, as partial wafers and as individual die. The device would be biased with a DC manipulator and the light output would be captured by an integrating sphere. The integrating sphere needed to be moved in and out of position on a repeatable basis when required.

LED Wafer Prober with Integrating Sphere

Light Emitting Diodes (LEDS)

• SA-6 Semiautomatic Probe System
  • 150 mm programmable X,Y,Z and theta stage
  • PILOT Software Suite – Navigator, Wafer Map and Autoalign
  • Vibration Isolation Table
• Standard (non-thermal) 150 mm wafer chuck and customized holders for frames, rings and die
• Ability to test whole wafers, partial wafers, individual die and wafers sawn & stretched on rings or frames
• Integrating Sphere mounted on a manually moved retractable stage
• Manual Manipulator with coaxial probe arm and DC probe tip

LED Testing with Integrating Sphere

LED Wafer Under Test

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