Semiconductor Testing & Prober Technology Insights

Success Story - Optoelectronics Double Sided Probing System

Written by Denis Place | August 28, 2018

Success Story – Europe

Optoelectronic Probe System with Thorlabs Multi-Axis Programmable Manipulators

Customer Requirements:

  • Manual Double Sided Probing System (DSP) for testing optoelectronic devices in die and module form.
  • Manual loading and un-loading of the device
  • The system had to be configured to electrically stimulate from the top of the device and optically stimulate and detect from the side of the device.
  • The manual three axis manipulators were placed on the top platen.
  • The programmable multi-axis optical manipulators were located underneath the top platen and placed on the bottom side platen.
  • The devices were heated and cooled with a thermal electric cooler (TEC).
  • DC and HF Probes are used.

SemiProbe Solution:

Top Vier of DUT holder and fiber

DUT holder with fiber and HF probe mounts 

Programmable Manipulator with fiber mounted on bottom platen.

Key System Components:

  • Probe System for Life (PS4L) M-4 manual probe system with Rapid Align wafer stage that includes coarse and fine X, Y, Z and theta.
  • Double Sided Prober (DSP) platen assembly to support two (2) programmable Thorlabs manipulators and three (3) manual manipulators with customized High Frequency probe arms
  • Manual microscope with zoom tube optics with a CCTV System
  • Customized TEC thermal system with integrated thermocouples for temperature feedback
  • Customized device holder

 To learn more about Advanced Optoelectronic Wafer Probers Click Here.