Customer Requirements:
- A Canadian University required a flexible probing solution that would allow them to test wafers up to 3kV. Volume was low so a manual probe system with manual manipulators and a variety of probe arms were desired. The probe system would get interfaced to a Keysight B1505. Due to the lethal voltage levels required to test the devices, a safety enclosure would be required. The system also had to pass a Canadian Standards Association (CSA Group) inspection.
SemiProbe Solution:
- PS4L M-6 (150 mm) manual probe system
- Rapid Align wafer stage with coarse and fine X,Y,Z and theta movement
- 150 mm wafer chuck with High Voltage (HV) chamber
- Compound Microscope Movement – 50 mm of X and Y and 50 mm of pneumatic Z lift
- Compound Optics with CCTV System
- Six (6) manual manipulators with an assortment of probe arms – HV, coax, triax and kelvin
- Vibration Isolation Table
- Dark Box with door safety interlocks
- Interconnect Panel – contains coaxial, triaxial, HV, safety interlock and direct pass throughs for cables as well as shelves for some of the Keysight modules