Success Story - High Power Wafer Probe Station in a Dark Box

January 08, 2020

Customer Requirements:

  • A Canadian University required a flexible probing solution that would allow them to test wafers up to 3kV. Volume was low so a manual probe system with manual manipulators and a variety of probe arms were desired. The probe system would get interfaced to a Keysight B1505. Due to the lethal voltage levels required to test the devices, a safety enclosure would be required. The system also had to pass a Canadian Standards Association (CSA Group) inspection.

High Power Manual Wafer Prober

SemiProbe Solution:

  • PS4L M-6 (150 mm) manual probe system
    • Rapid Align wafer stage with coarse and fine X,Y,Z and theta movement
    • 150 mm wafer chuck with High Voltage (HV) chamber
  • Compound Microscope Movement – 50 mm of X and Y and 50 mm of pneumatic Z lift
  • Compound Optics with CCTV System
  • Six (6) manual manipulators with an assortment of probe arms – HV, coax, triax and kelvin
  • Vibration Isolation Table
  • Dark Box with door safety interlocks
  • Interconnect Panel – contains coaxial, triaxial, HV, safety interlock and direct pass throughs for cables as well as shelves for some of the Keysight modules



Topics: Application - High Power, Success Stories, Manual Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
Find me on:
Semiconductor Wafer Testing Discovery Call

Subscribe to our email list.

SemiProbe Capabilities & Applications Guide for Wafer Characterization & Testing