Customer Requirements:
• Multi-Purpose manual probing solution for die, partial wafers, wafers up to 200 mm and wafers mounted on frames.
• Vibration Isolation Table and Dark Box
• Combination of DC and HF manipulators and probe arms
SemiProbe Solution:
Key System Components:
• Lab Assistant – Model LA-200 – is a small footprint manual probing system with a wafer stage that provides 205 mm x 205 mm of X & Y travel, a 20 mm Z movement and coarse and fine theta.
• High Frequency Chuck – ambient, 200 mm vacuum holes with two (2) calibration substrate holders and selectable zones
• Large Platen – aluminum with a steel skin and a removable front wedge. Platen allows manipulators and probe cards to be used. Platen has a 15 mm manual lift.
• Microscope Post with a 100 mm x 100 mm low-profile X & Y coaxial microscope movement with locking knobs and microscope adapter.
• Stereo zoom Optics – with eyepieces and a c-mount camera port, magnification of 100x and a working distance of 100 mm with a large field of view
• CCTV System – camera adapter, color camera, 24” color monitor, power supply, and cords
• Vibration Isolation Table – table frame with casters and leveling feet, metric optical breadboard and monitor post.
• Dark Box – front opening door that raises upwards, chuck switch panel, light, interconnect panel with coaxial feedthrough connectors and a rubberized boot for direct cable feedthrough into the dark box.
• Manipulators – six (6) manual MA-9000 body with magnetic base, four (4) adjustable probe arm faceplates, four (4) coaxial probe arms, and two (2) high frequency probe arms – West/East
• Probes – DC, 12.5 um radius tungsten; High Frequency, GSG, 150 um, 40 GHz
• Calibration substrate
• Junkosha 40 GHz HF cables, 48” long
MA-9000 Manual Manipulator with magnetic base and West/East High Frequency probe arm
GGB Model 40A GSG-150 um pitch high frequency probe
200 mm High Frequency chuck with vacuum holes, selectable zones and two (2) auxiliary chucks for calibration substrates and or probe tip cleaning pad.
