Success Story - MEMS Manual Wafer Prober

Customer Requirements:

The customer wanted to test 200 mm silicon MEMS wafers using a manual probe system integrated with a Polytec MSA-500 MEMS Motion Analyzer. The motion analyzer would measure a variety of MEMS devices while in-plane and out-of-plane. The wafer chuck would need to be tilted in a variety of directions. The devices would be contacted with a probe card as well as individual manipulators with coaxial probe arms and DC probe needles.

200 mm MEMS Manual Probe System integrated with a Polytec MSA-500 Motion Analyzer

• M-8 – 200 mm manual probe system
  • 200 mm of X,Y, Z and theta stage
  • Rapid Align Stage provides both coarse and fine stage movement
  • Vibration Isolation Table
• 200 mm wafer chuck (non-thermal) with X and Y in-plane and out-of-plane adjustability for the MSA-500
• Compound Microscope Bridge
• Compound Microscope Movement – 50 mm of X and Y with pneumatic microscope lift (MSA 500)
• Six (6) manual three axis manipulators with coaxial probe arms, cables and DC probes and a probe card holder

Adjustable Wafer Chuck - For In Plane and Out-of-Plane MEMS Measurements

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