Customer Requirements:
The customer wanted to test 200 mm silicon MEMS wafers using a manual probe system integrated with a Polytec MSA-500 MEMS Motion Analyzer. The motion analyzer would measure a variety of MEMS devices while in-plane and out-of-plane. The wafer chuck would need to be tilted in a variety of directions. The devices would be contacted with a probe card as well as individual manipulators with coaxial probe arms and DC probe needles.
200 mm MEMS Manual Probe System integrated with a Polytec MSA-500 Motion Analyzer
- M-8 – 200 mm manual probe system
- 200 mm of X,Y, Z and theta stage
- Rapid Align Stage provides both coarse and fine stage movement
- Vibration Isolation Table
- 200 mm wafer chuck (non-thermal) with X and Y in-plane and out-of-plane adjustability for the MSA-500
- Compound Microscope Bridge
- Compound Microscope Movement – 50 mm of X and Y with pneumatic microscope lift (MSA 500)
- Six (6) manual three axis manipulators with coaxial probe arms, cables and DC probes and a probe card holder
Adjustable Wafer Chuck - For In Plane and Out-of-Plane MEMS Measurements
To learn more about other advanced wafer probers Click Here
