Semiconductor Testing & Prober Technology Insights

MEMS Manual Wafer Prober

June 25, 2019

Customer Requirements:

The customer wanted to test 200 mm silicon MEMS wafers using a manual probe system integrated with a Polytec MSA-500 MEMS Motion Analyzer. The motion analyzer would measure a variety of MEMS devices while in-plane and out-of-plane. The wafer chuck would need to be tilted in a variety of directions. The devices would be contacted with a probe card as well as individual manipulators with coaxial probe arms and DC probe needles.

MEMS 1-1


200 mm Manual Probe System integrated with a Polytec MSA-500 Motion Analyzer

  • M-8 – 200 mm manual probe system
    • 200 mm of X,Y, Z and theta stage
    • Rapid Align Stage provides both coarse and fine stage movement
    • Vibration Isolation Table
  • 200 mm wafer chuck (non-thermal) with X and Y in-plane and out-of-plane adjustability for the MSA-500
  • Compound Microscope Bridge
  • Compound Microscope Movement – 50 mm of X and Y with pneumatic microscope lift (MSA 500)
  • Six (6) manual three axis manipulators with coaxial probe arms, cables and DC probes and a probe card holder

mems 2-1

mems 21

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Topics: MEMS, Advanced Probe System

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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