Success Story – Taiwan - MEMS Semiautomatic Wafer Prober

October 04, 2021

Turnkey and Integrated 200 mm Semiautomatic Probe System with an Olympus Metallurgical Microscope for a large Wafer Foundry

Customer Requirements:

  • Complete turnkey and integrated wafer probing system to test a variety of MEMS  technologies in whole wafer, partial wafer and die form over temperature.
  • Integrated solution had to provide a fully functional topside and bottom side wafer probing and high magnification inspection capabilities using one platform and in a dark box
  • Programmable Manipulators with HF and DC probe arms for electrical testing and fluidic dispense
  • The devices needed to be heated and monitored from ambient to > 300 degrees.
  • All test instrumentation, cables, connectors and a Graphical User Interface (GUI) had to be provided

SemiProbe Solution:

MEMS Semiautomatic Wafer Prober

Semiautomatic multi-application  MEMS Prober with programmable manipulators, thermal chuck, Olympus metallurgical microscope, dark box, and vibration isolation table


MEMS Semiautomatic Wafer Prober System

Programmable Manipulators with High Frequency and Triaxial Probe Arms with DSP wafer chuck                                   


MEMS Semiautomatic Wafer Probe Chuck

 DSP Wafer Carrier


 MEMS Semiautomatic Wafer Probe Programmable Stage

DSP Chip Carrier for individual die

Whole wafers, partial wafers, and individual die can be probed on the system using manipulators or a probe card. The devices are inserted in customized carriers and are held in place via mechanical clamping. The devices can be loaded on an adjacent bench or table and are easily inserted into and removed from the chuck assembly.  

Key System Components:

  •   PS4L SA-8 semiautomatic probe system with programmable X,Y,Z, and theta stage
  •   200 mm thermal chuck system that operates from ambient to > 300 C
  •   Custom carriers for whole wafers, partial wafers, and individual die
  •   Customized Microfluidic Dispense System – input and output
  •   Four (4) programmable manipulators with coaxial, triaxial and high-frequency probe arms
  •   Probe Card Holder
  •   Test Instrumentation Rack and Cabling
  •   Customized Vibration Isolation Table, Dark Box, and Dark Box Feedthrough Interconnect Panel
  •   Customized Graphical User Interface (GUI)

Keithley Semiconductor Device Characterization Handbook

Topics: Application - MEMS, Success Stories, Semi-Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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SemiProbe Capabilities & Applications Guide for Wafer Characterization & Testing