Success Story - MEMS Semiautomatic Wafer Prober - Vacuum Prober - Thermal Chuck

Customer Requirements:

The customer wanted to test 200 mm silicon MEMS wafers under vacuum. They wanted the ability to test at low and high temperatures (-60 C to 200 C). They wanted the ability to use probe cards as well as programmable manipulators with DC and High Frequency (HF) probe arms. The probe system would need the ability to interface to a variety of Keithley and Keysight test instrumentation. The microscope bridge needed the ability to support optics, black bodies and a Polytec MEMS motion analyzer.

Semiautomatic MEMS Vacuum Prober with Thermal System and Keithley 4200 SCS

Semiautomatic 200 mm Vacuum Probing System

• SA-8 Semiautomatic 200 mm Probe System
  • 200 mm programmable X,Y,Z and theta stage
  • PILOT Software Suite – Navigator, Wafer Map, Autoalign and Programmable Manipulator Modules
  • Vibration Isolation Table
• Large Vacuum Chamber with removable top and front- loading door for easy loading and unloading of devices
• Thermal Chuck System that operates from -60 C to 200 C
• All Components in the vacuum chamber rated to 10-6 torr
• Agilent turbo-molecular vacuum pump
• Large Microscope Gantry for the simultaneous mounting of optics, black bodies and motion analyzer
• Compound Optics with CCTV System
• Programmable Manipulators and Probe Cards
  • Four (4) programmable three axis manipulators with DC and HF probe arms, cables and probes
  • Probe Card Holder – 4.5” cards
• Integrated with Keithley Instruments 4200 Parametric Analyzer

MEMS Vacuum Chamber with Blackbody

Turnkey MEMS Vacuum Prober including Pilot Software Suite, Blackbody Controller and Keithley 4200 SCS

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