Semiconductor Testing & Prober Technology Insights

MEMS Semiautomatic Wafer Prober - Vacuum Prober - Thermal Chuck

May 28, 2019

Customer Requirements:

The customer wanted to test 200 mm silicon MEMS wafers under vacuum. They wanted the ability to test at low and high temperatures (-60 C to 200 C). They wanted the ability to use probe cards as well as programmable manipulators with DC and High Frequency (HF) probe arms. The probe system would need the ability to interface to a variety of Keithley and Keysight test instrumentation. The microscope bridge needed the ability to support optics, black bodies and a Polytec MEMS motion analyzer.

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Semiautomatic 200 mm Vacuum Probing System

  • SA-8 Semiautomatic 200 mm Probe System
    • 200 mm programmable X,Y,Z and theta stage
    • PILOT Software Suite – Navigator, Wafer Map, Autoalign and Programmable Manipulator Modules
    • Vibration Isolation Table
  • Large Vacuum Chamber with removable top and front- loading door for easy loading and unloading of devices
  • Thermal Chuck System that operates from -60 C to 200 C
  • All Components in the vacuum chamber rated to 10-6 torr
  • Agilent turbo-molecular vacuum pump
  • Large Microscope Gantry for the simultaneous mounting of optics, black bodies and motion analyzer
  • Compound Optics with CCTV System
  • Programmable Manipulators and Probe Cards
    • Four (4) programmable three axis manipulators with DC and HF probe arms, cables and probes
    • Probe Card Holder – 4.5” cards
  • Integrated with Keithley Instruments 4200 Parametric Analyzer


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To  learn more about Advanced MEMS Wafer Probers Click Here

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Topics: Advanced Probe System

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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