Success Story - Thermal RF MEMS Probe Station - United States

April 01, 2020

Customer Requirements: 

  • The customer had 150 mm and 200 mm wafers with RF components that needed to be tested over a temperature range of -60 C to 300 C. They needed the ability to perform 2-port, 3-port and 4-port measurements using a Keysight Vector Network Analyzer.
    Thermal Probe System using RF Probes

RF Probe Station  Solution

Key System Components: 

  • 200 mm semiautomatic RF Probe Station with a programmable X,Y, Z and theta wafer stage
  • 200 mm thermal chuck system that operates from – 60 C to 300 C with gold plated RF add-on surface
  • A localized environmental chamber (LEC) with a top hat to provide light tight, EMI shielded and frost-free probing
  • Compound Optics Bridge with 50 mm x 50 mm x 80 mm of Compound Optics Movement and Compound Optics with motorized zoom
  • Four (4) manual MA-8500 manipulators with West/East and North/South RF probe arms with 40 GHz and 65 GHz RF probes, calibration substrate and    cables.   
    MA-8500 configured for RF Probe Station
  • Two (2) MA-8100 manipulators with coaxial probe arms for DC bias
  • PILOT Software Suite (Navigator, Wafer Map and Autoalign)
  • Vibration Isolation Table (VIT) with adjustable Monitor/Keyboard/Mouse Rack
  • Small footprint and quiet air compressor for the VIT and pneumatic microscope lift

Thermal RF Probe Station using RF Probes


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Topics: Application - High Frequency, Application - MEMS, Success Stories, Semi-Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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