Success Story – Vacuum Prober – China
Customer Requirements:
• Semiautomatic vacuum probing system for testing MEMS wafers – Gyroscopes, Microbolometers• Had to be able to mount blackbodies and a Polytec MSA-500 Vibrometer and interface with a Keithley 4200 parametric analyzer
• The system had to handle 100 mm, 150 mm and 200 mm wafers and operate automatically in a vacuum environment to 15x10-4 Torr
• Programmable manipulators with DC and High Frequency probe tips and probe cards with up to 24 connections
SemiProbe Solution:
SemiProbe Solution:
Key System Components:
• Vibration Isolation Table (VIT)
• Vacuum Chamber with front-loading wafer capabilities and removable top
• 200 mm wafer stage with programmable X, Y, Z and theta stage
• Thermal chuck that operates from -60 C to 200 C
• Mechanical wafer clamping with carrier plates to handle 100 mm, 150 mm and 200 mm wafers
• Large travel microscope movement with Zoom Tube optics, CCTV system and mounts for blackbodies and MSA-500 vibrometer
• Three (3) programmable three (3) axis manipulators with customized probe arms – DC & HF
• Probe Card Holder (PCH)
• Software – PILOT Suite (Pilot, Wafer Map, Auto-Align)
• Turbo Molecular Vacuum Pump with Dual Channel Throttle Valve Controller
System Summary:
The probe system can be operated in manual and semiautomatic modes. It can be controlled locally or remotely.
