Customer Requirements:
•A large MEMS company required a 300 mm manual probe system that operated up to 400 C for Wafer Level Reliability (WLR) applications. The requirement was that probes would need to remain in contact with the sample for several hours or multiple days. The user would have the option of going to temperature and then to probe contact or to be in constant probe contact as the temperature was ramped up or down.
SemiProbe Solution:
• PS4L M-12 (300 mm) Manual Probe System with a rapid align wafer stage and digital readout (DRO) that provided X and Y stage positions, control electronics, PC, monitor, and PILOT Software Suite – Navigator and Wafer Map.
• 300 mm thermal chuck system that operated from ambient to 400 C - locally and remotely
and could hold 200 mm and 300 mm wafers.
• A customized and liquid cooled platen with a re-circulating chiller unit to prevent the manipulators and platen from heating up.
• Programmable X, Y and Z microscope movement with a pneumatic lift
• Long working distance and high magnification optics with a motorized focus and a customized air-cooling source.
• CCTV System – color camera and color monitor
• Eight (8) Programmable MA-9000 manipulators with magnetic bases and customized high temperature coaxial probe arms.
• Customized software that allowed the probes to remain in contact with the DUT while the temperature was ramping up.
• Vibration Isolation Table with adjustable monitor/keyboard and mouse rack
• Dark Box with selectable cooling fans provided light shielding and operator safety while testing at elevated temperatures.
• Interconnect Panel with coaxial and triaxial feedthroughs as well as a rubberized boot for direct cable passthrough.
Large and liquid cooled platen with eight (8) programmable manipulators with magnetic bases and high temperature probe arms. The long working distance optics has a motorized zoom and is mounted to a programmable X, Y and Z microscope movement. All movements can be performed locally or remotely via remote commands
PS4L M-12 (300 mm) manual probe system with the dark box closed. The dark box can be opened and closed while the probes are in contact with the device under test (DUT). The user has the option of placing the interconnect feedthrough panel on either side. The dark box is mounted on a perimeter structure that mounts to the vibration isolation table (VIT) frame. The prober is mechanically isolated from the dark box. The dark box has rear cable feedthrough access, and the back panel is removable for easy access to the back of the probe system.
