Success Story - Fully Automatic Wafer Prober - MEMS

July 16, 2019

Customer Requirements:

The customer wanted a highly flexible fully automatic 200 mm probe system for MEMS production. The system had to have the ability to handle wafers (100 mm, 150 mm and 200 mm), wafers mounted on frames and trays of die. The system had to provide the ability to be operated in manual, semiautomatic and fully automatic modes. The system had to operate with probe cards and manipulators.

Fully Automatic Wafer Prober MEMS

  • A PS4L FA-8 fully automatic probe system consisting of:
    • A 205 mm x 205 mm programmable X,Y,Z and theta stage
    • A 200 mm standard chuck with lift and alignment pins
    • Vibration Isolation Table
  • A compound microscope bridge and compound microscope movement (50 mm of X and Y and 50 mm of pneumatic Z)
  • Compound Optics with a CCTV System
  • Probe Card Holder and Manipulators (4) with coaxial probe arms
  • Material Handling System consisting of two (2) cassettes, a pre-aligner, a dual end-effector (paddle and gripper), bar code reader and enclosure


Wafer Chuck with lift pins for Fully Automatic Probe System    End-Effector with paddle and scanner for Fully Automatic Probe System   Fully Automatic Wafer Prober Material Handling System


To learn more about other Advanced MEMS Wafer Probers Click Here

To learn more about our complete Wafer Probe Testing Solutions go here.


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Topics: Application - MEMS, Success Stories, Fully Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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SemiProbe Capabilities & Applications Guide for Wafer Characterization & Testing