Customer Requirements:

• A Government Lab wanted a multi-purpose 200 mm semiautomatic probe system for magnet stimulation measurements. The contact to the device under test (DUT) was with manual manipulators and high-pin count probe cards.

SemiProbe Solution:

• PS4L SA-8 Semiautomatic Probe System with a programmable X, Y, Z, theta, control electronics, PC, monitors, and PILOT Software Suite

• Long working distance and high magnification optics with CCTV System

• Integrated GMW Model 5203 Vertical Projected Field Electromagnet with power supplies, controller, and recirculating water chiller

• Interchangeable carrier plates for MSS measurement application – whole wafers and

individual die

• Customized thermal system to provide +25 C to +225 C temperature capabilities

• Four (4) manual MA-9000 manipulators with coaxial probe arms and vacuum bases

• Probe Card Holder (PCH) with coarse and fine theta adjust

• Test Instrumentation Shelf

• Vibration Isolation Table with adjustable monitor/keyboard and mouse rack