Success Story- 300 mm High Power Wafer Probe Station

January 08, 2020

Customer Requirements:

  • The customer is involved with the CERN Program and required a flexible 300 mm semiautomatic system to test high voltage sensor arrays and a variety of other devices. The system would need high and low temperature capabilities. Manual manipulators with a few different standard as well as high voltage (HV) probe arms were required. The system needed the ability to test devices that ranged from 1 kV to 10 kV. The system would get interfaced to Keysight B1505 test instrumentation.

High Power Wafer Prober

SemiProbe Solution:

  • A PS4L SA-12 (300 mm) semiautomatic probe system
    • A 305 mm x 305 mm programmable X,Y and Z wafer stage
    • A 300 mm thermal chuck with a triaxial HV addon surface that operated from -60 C to 200 C.
    • A localized environmental chamber (LEC) with a top hat
  • Compound Microscope Bridge with a 50 mm x 50 mm X and Y microscope movement and an 80 mm pneumatic Z lift
  • Compound Optics and CCTV System
  • PC/Monitors/Keyboard/with adjustable rack
  • PILOT Software Suite – Navigator, Wafer Map and Autoalign
  • Six (6) manual manipulators with a variety of probe arms – coax, triax and high voltage (3 kV and 10 kV)
  • Vibration Isolation Table (VIT) with a Laser Light Safety Curtain
  • Interlock Panel – mounted to the plexiglass cover and contains a variety of feedthroughs and safety interlock


High Power Wafer Prober


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Topics: Application - High Power, Success Stories, Semi-Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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SemiProbe Capabilities & Applications Guide for Wafer Characterization & Testing