Semiconductor Testing & Prober Technology Insights

Optoelectronics Wafer Test System - Success Story - VSCELS EELEDS

May 20, 2019


The customer wanted a multipurpose semiautomatic probe system to test vertical-cavity surface-emitting laser diodes (VCSELS) and edge-emitting laser diodes (EELDS) on the same system using a single integrating sphere. The VCSELS would be in wafer form and the EELDS would be in laser bars.


Optoelectronics Wafer Test System VCSELS EELEDS

Using our patented Probe System for Life (PS4L) Adaptive Architecture we configured a solution consisting of:

  • SA-6 Semiautomatic Probe System
    • 150 mm programmable X,Y,Z and theta stage
    • PILOT Software Suite – Navigator, Wafer Map and Autoalign
    • Vibration Isolation Table
  • Multi-Purpose gold plated chuck that allowed both VCSELS and EELDS to be mounted and held via vacuum
    • Individual vacuum fixation for the EELD devices/bars
  • Single Integrating Sphere used for both applications
    • Minimum changeover required to address both requirements – VCSELS and EELDS
  • Compound Optics with CCTV System
  • Manual Manipulators with coaxial probe arms and DC probe tips

Optoelectronics Wafer Test System VCSELS EELEDS

Optoelectronics Wafer Test System VCSELS EELEDS Optoelectronics Wafer Test System VCSELS EELEDS

 To learn about more advanced Optoelectronic Wafer Probers Click Here

Topics: Optoelectronics, Advanced Probe System

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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SemiProbe Capabilities & Applications Guide for Wafer Characterization & Testing