Customer Requirements:

A customer in the United States was looking for a customized and small-footprint, double-sided probing system to test optoelectronic devices in an environmental chamber.

SemiProbe Solution:

• A manual Lab Assistant probe system referred to as an LA-150

• 150 mm x 150 mm X & Y coaxial wafer stage with Z and theta

• 150 mm DSP chuck carrier plate with mechanical clamping.

• A platen with a platen lift that accommodates individual manipulators or a probe card holder.

• A small environmental chamber that provided access to the device backside when using a customer supplied light detector and test instrumentation.

• A rigid microscope post with a 100 mm x 100 mm X, Y coaxial microscope movement with axis locking knobs.

• A stereo zoom microscope with a long working distance (WD) and large field of view (FOV).

• CCTV System Kit - color camera with color monitor, cables, and power supply

• Four (4) manual MA-9000 manipulators with magnetic bases and coaxial probe arms.

• Assortment of tungsten probe tips