Customer Requirements:

• A university wanted a 150 mm semiautomatic, multi-purpose, double-sided probing (DSP) system to test a variety of optoelectronic devices using DSP carriers and standard chucks. They wanted the ability to test using conventional probing (topside down using a thermal chuck) or in a DSP mode, where they had the option of probing from both sides (top and bottom) using carrier plates. They wanted to have options on where they mounted their detectors – in the  front or on the sides.

SemiProbe Solution:

• PS4L SA-6 (150 mm) Semiautomatic Probe System with a programmable X, Y, Z, and theta stage, control electronics, PC, monitor, and PILOT Software Suite – Navigator, Wafer Map, and Auto align.

• 150 mm thermal chuck system that operates from ambient

to 200 C - locally and remotely, and could hold die, partial wafers, and whole wafers up to 150 mm.

• DSP Carrier Plates and holders that would hold die, 75 mm, 100 mm, 150 mm wafers, and thermal chuck.

• Topside Platen with coarse and fine platen lift

• Bottom Side Platen for manipulators, DSP camera, and detectors

• Rigid Microscope Post with a 100 mm x 100 mm coaxial microscope movement and axis locking knobs.

• Stereo Zoom optics that provided a large working distance (WD) and field of view (FOV).

• CCTV System – color camera and color monitor

• DSP adjustable Upwards Looking Camera System

• Three (3) Manual MA-9000 manipulators with magnetic bases. One is configured with an HF West/East probe arm with an adjustable optical fiber holder, and the others are with triaxial probe arms.

• Vibration Isolation Table with adjustable monitor/keyboard and mouse rack