Customer Requirements:
• A Government Lab wanted a multi-purpose 200 mm semiautomatic probe system for magnet stimulation and high voltage measurements up to 3 KV. The contact to the device under test (DUT) was with manual manipulators configured with low and high-voltage triaxial probe arms.
SemiProbe Solution:
• PS4L SA-8 Semiautomatic Probe System with a programmable X, Y, Z, and theta with control electronics
• Integrated GMW Model 5203 Vertical Projected Field Electromagnet with power supply, recirculating water chiller and Hall Effect Calibration Kit
• Interchangeable carrier plates for MSS measurement application – whole wafers and individual die
• 100 mm 3KV chuck with triaxial kelvin connections
• Eight (8) manual manipulators with low and high voltage triaxial probe arms
• Dark Box with remote light source, interconnect panel with low and high voltage feedthroughs and safety interlock system
• Vibration Isolation Table with adjustable monitor/keyboard and mouse rack
