Turnkey Optoelectronic Probe and Test System with a Graphical User Interface (GUI)

August 28, 2018

Success Story – Canada

Customer Requirements:

  • Complete turnkey Semiautomatic Double-Sided Probing (DSP) System with Test Instrumentation for testing optoelectronic devices in wafer, partial wafer and in die forms over temperature and in a dark environment.
  • The system had to be configured to electrically test from the top of the wafer and optically detect an output from the bottom of the wafer.
  • The optical detector is located underneath the wafer and had to be moved in X, Y and Z using a programmable manipulator.
  • The devices needed to be heated and monitored from ambient to > 200 degrees.
  • All test instrumentation, cables, connectors and a Graphical User Interface (GUI) had to be provided

Turn Key Optoelectronic Double Sided Probing System

Turn Key DSP Semiautomatic Optoelectronic Probing System

Double Sided Probing top side probes thermal system

DSP Topside Probes and Thermal System

 Double Sided Prober Wafer Carrier

DSP Wafer Carrier for testing wafers 100 mm, 150 mm, and 200 mm.

Double sided probing carrier for testing partial, broken, or fragments of wafers

DSP Carrier for Testing Partial (broken, fragments) Wafers

Double Sided Probing Chip Carrier for Testing Individual Die

DSP Chip Carrier for Testing Individual Die


SemiProbe Solution:

Wafers, Partial Wafers and individual die can be probed. They are inserted in customized carriers and are mechanically held in place. The devices can be loaded on an adjacent bench or table and are easily inserted into and removed from the chuck assembly.  

Key System Components:

  • SA-8 semiautomatic probe system with programmable X,Y,Z and theta stage
  • Double Sided Prober (DSP) chuck assembly with carriers for wafers, partial wafers and individual die.
  • Zoom Tube optics with a CCTV System
  • Customized thermal system with integrated thermocouples for temperature feedback
  • Customized programmable backside detector unit for light optimization
  • Test Instrumentation, Cabling and Rack
  • Vibration Isolation Table, Dark Box and Dark Box Feedthru Interconnect Panel
  • Customized Graphical User Interface (GUI)

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Topics: Application - Optoelectronics, Application - Double-Sided, Success Stories, Semi-Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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SemiProbe Capabilities & Applications Guide for Wafer Characterization & Testing