Success Story - Fully Automated Vacuum Probing System for Testing MEMS wafers up to 150 mm

July 23, 2019

Success Story – MEMS – United States

Customer Requirements:

  • Fully Automatic vacuum probing system for high volume testing of MEMS wafers
  • The system had to handle 100 mm and 150 mm wafers automatically and operate in a vacuum environment to 15x10-3 Torr
  • DC and High Frequency probe tips and a vacuum compatible high pin probe card with up to 100 SMA connections
  • Wafers are standard silicon and or silicon with EPI layers
  • Die size ranged from 3 mm to 9 mm in size and Bond Pads ranged from 2 mil to 4 mil


SemiProbe Solution:

Fully Automated Vacuum Prober for MEMS Testing

Fully Automated Vacuum Prober for MEMS Testing

Key System Components:

  • Vibration Isolation Table (VIT)
  • Vacuum Chamber with side and front-loading wafer capabilities and removable topMaterial Handling Unit (MHU) with Cassette and Load Lock
  • 150 mm wafer stage with programmable X, Y, Z and theta stage
  • Ambient chuck with mechanical wafer clamping
  • Material Handling Unit (MHU) – single cassette (100 mm & 150 mm) with end effector, pre-aligner and load lock
  • Large travel microscope movement with Zoom Tube optics and CCTV System
  • Three (3) programmable three (3) axis manipulators with customized probe arms – DC & HF
  • Probe Card Holder (PCH)
  • Software – PILOT Suite (Pilot, Wafer Map, Auto-Align and MHU)
  • Turbo Molecular Vacuum Pump with Dual Channel Throttle Valve Controller


  Material Handling Unit (MHU) with Cassette and Load Lock

System Summary:

The probe system can be operated in semiautomatic and fully automatic modes. It can be controlled locally or remotely.

To learn about more advanced MEMS Wafer Probers Click Here


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Topics: Application - MEMS, Application - Vacuum, Success Stories, Fully Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
Find me on:
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