Success Story - Fully Automatic Double-Sided Optoelectronics Wafer Test System

May 13, 2019

The customer wanted a 300 mm fully automatic double-sided probe system for high volume silicon photonics testing in a production environment. The system had to provide the ability to bias the device with a probe card on the top while detecting light output from the bottom of the wafer. The system needed to provide low and high temperature capability from -40 C to 200 C in a frost-free and shielded environment. The system had to be able to operate 24 hours a day, 7 days a week. The system had to be tested to and certified to a variety of SEMI, UL and other safety standards.

Fully Automatic Double-Sided Optoelectronics Wafer Test System

  • A PS4L FA-12 (300 mm) probe system consisting of:
    • 305 mm x 305 mm programmable X,Y,Z and theta stage
    • A double-sided 300 mm wafer carrier assembly
    • A localized environmental chamber (LEC) and cover
    • A programmable coarse and fine X,Y,Z stage with mount for backside detector
  • A compound microscope bridge and microscope movement (100 mm x 100 mm) with a pneumatic 50 mm Z lift
  • Compound Optics and CCTV System
  • PC/Monitors/Keyboard/Adjustable Rack
  • PILOT Software Suite – Navigator, Wafer Map and Autoalign
  • A non-contact height measurement system
  • A thermal system that can operate from -40 C to 200 C
  • A material handling unit (MHU) that can handle two (2) 300 mm FOUPS with AGV loading and un-loading
  • Fully Certified SEMI System

Fully Automatic Double-Sided Optoelectronics Wafer Test System

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Topics: Application - Optoelectronics, Application - Double-Sided, Success Stories, Fully Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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