Success Story – High Power - Vacuum Wafer Probe Testing

April 23, 2020

Customer Requirements:

The customer wanted a wafer probe testing solution to test a variety of wafers ranging in size from 100 mm to 200 mm at high voltages in a vacuum environment. They wanted the ability to test both vertical and lateral devices at ambient and up to 10 KV. They wanted the ability to use probe cards as well as individual programmable manipulators with HV and DC probe arms. The probe system would need the ability to interface to a Keysight B1505 parametric analyzer and other test instrumentation.

High Power High Vacuum Wafer Probe System

SemiProbe Wafer Probe Testing Solution:

Semiautomatic 200 mm Vacuum Wafer Probe Testing System

  • SA-8 Semiautomatic 200 mm Wafer Probe System
    • 200 mm programmable X,Y,Z and theta stage with control electronics
    • PILOT Software Suite – Navigator, Wafer Map, Autoalign and Programmable Manipulator Modules
    • Vibration Isolation Table
  • Large Vacuum Chamber with removable top and front- loading door for easy loading and unloading of devices
  • Triaxial Chuck System that operates at ambient
  • All Components in the vacuum chamber rated to 10-5 torr
  • Agilent turbo-molecular vacuum pump
  • Large microscope bridge and movement with X,Y Z and theta for long working distance optics with a motorized focus
  • Compound Optics with CCTV System
  • Programmable Manipulators and Probe Cards
    • Four (4) programmable three axis manipulators with coaxial HV (10 KV) and low voltage (600 V) triaxial DC probe arms, cables and probes
    • Probe Card Holder – 4.5” cards
  • Integrated with Keysight B1505 Parametric Analyzer

Wafer Probe Testing Solution for High Power and High Vacuum

 Wafer Probe for High Power and High Vacuum       High Power High Vacuum Wafer Probe Solution


Learning more about our advanced Wafer Probe Testing Systems and Solutions and the advantages of the PS4L modular Wafer Probe Testing Systems approach.


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Topics: Application - High Power, Application - Vacuum, Success Stories, Semi-Automatic Systems

Author: Denis Place

Denis Place is one of the founders of SemiProbe and has more than 35 years of experience working in the international semiconductor industry. He has degrees in electrical engineering and business management. Place is in a unique position, because he personally used and worked with probing systems for many years before starting his own semiconductor probing company.
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SemiProbe Capabilities & Applications Guide for Wafer Characterization & Testing